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Dale E. Ewbank, Ph.D.
Senior Lecturer
Electrical and Microelectronic Engineering
Rochester Institute of Technology
79 Lomb Memorial Drive
Rochester, NY  14623-5603
Tel: (585) 475-4941
Fax: (585) 475-5041
Email: Dale.Ewbank@rit.edu



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Lecture and Laboratory for old quarters

0305-221 Introduction to Micro/Nanolithography
0305-320 Design of Experiments
0305-564/722 Microlithography Systems
0305-574/722 Microlithography Systems Laboratory
0305-666/721 Microlithography Materials and Processes
0305-676/721 Microlithography Materials and Processes Laboratory


Homepage RIT A-Z Site Index
Electrical and Microelectronic Engineering
MicroE
Microelectronic Engineering Student Association
SPIE/OSA student chapter
Semiconductor and Microsystems Fabrication Lab

About Dale Ewbank
Research Interests
Teaching Philosophy

Lecture and Laboratory Notes for Semester Courses

Micro/Nanolithography Overview 

MCEE 205 Statistics and DOE 

MCEE 505/605 Lithography Materials & Proc
MCEE 505/605 LM&P Lab

MCEE 515/615 Nanolithography Systems
MCEE 515/615 NS Lab

https://mycourses.rit.edu/

Sponsors

Brewer Science, Inc.

PROLITH by KLA-Tencor

Research and Course Development

Photovoltaics

Other useful Microelectronic Engineering references

Server Access to KGCOE-kif
ETM Mask map
Dr. Lynn Fuller at RIT
Nanolithography Research Labs

Personal Interests

Hospice Regatta
Sailing at GYC

 

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