Microelectronic Engineering Program

Introduction to Micro/Nanolithography

0305-221 Lecture and Laboratory

Course Outline                             Standard for Complete answer 

Micro/Nanolithography Overview 082012     RIT library
 
Dale Ewbank
475.4941 Office 17/2551
dale.ewbank@rit.edu

Lecture:

Assignment #1    Due Monday 03/11/2013

Assignment #2    Due Monday 03/18/2013

First Exam is scheduled for Wednesday April 3, 2013

Assignment #3    Due Wednesday 03/27/2013

Assignment #4    Due Friday 04/12/2013

Assignment #5    Due Monday 04/22/2013 Assign5_GCA_stepper.xls

Second Exam is scheduled for Friday April 26, 2013

Assignment #6    Due Wednesday 05/08/2013

FINAL Exam is schedule on SIS.

 Laboratory: Outline

Server Access_to_kif                                          VLSI Remote Access Instructions

Lab Photoresist Coating/Measurement and Introduction to Projection Steppers               Intro, Procedure GCA 04/03/2009   Resist_thickness_Steppers_iline03152011              ETM Mask map

Lab Resist Sensitivity and Contrast  Intro, Procedure 03302012  iline_03272010

Lab Pattern Transfer and Etching  Intro, Procedure 04022010

Lab Second Masking/Alignment, Overlay and Registration  Intro, Procedure 05082012

Leo SEMs of oxide etch 20083

Instructors:
   Dale Ewbank dale.ewbank@rit.edu

TA's 475.4453 Office 09/1360

Elizabeth Bowser
ejb5780@rit.edu

        
SMFL Safety information
     
Lab Report Guidelines

and other Microlithography Lab references

Background references:

Intro to MicroE: PMOS

Intro to MicroE: L6 Resistor fabrication

 

http://www.icknowledge.com/

http://www.icknowledge.com/freecontent/Introduction%20to%20IC%20technology%20rev%205.pdf

http://www.itrs.net/reports.html

 

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