Rochester Institute of Technology
Microelectronic Engineering

Week	Project	Assignment
1	Introduction,Lab Notebooks,Safety,Photo Masks	Lab Notebooks, Safety Exam
2-3	Photo resist Coating/Measurement and Introduction to Projection Steppers	Lab Notebook
4-5	Resist Sensitivity & Contrast	Lab Notebook
6-8	Pattern Transfer and Etching	Lab Notebook
9-10	Second Masking/Alignment,Overlay and Registration	Lab Notebook

**** Lab Notebooks due Week 4, end of the lab day *************************

**** Lab Notebooks due Week 7, end of the lab day *************************

**** Formal Laboratory Report due Week 9 ***********************************

**** Lab Notebooks due Week 10, end of the lab day ************************

In addition to the requirements of the lab notebook, one of the projects will

be written as a Formal Laboratory Report, following the guidelines for the

preparation of a technical paper.

Evaluation based on:

Notebook Week 4 23%

Notebook Week 7 23%

Notebook Week 10 23%

Formal Laboratory Report Week 9 23%

Participation 8%