Microelectronic Engineering Program

Design of Experiments

0305-320 Lecture and Laboratory

Course Outline                             Standard for Complete answer
 
Dale Ewbank
475.4941 Office 17/2551
dale.ewbank@rit.edu

Lecture:

Assignment #1 Due Thursday 12/06/2012          RIT library
Assignment #2 Due Monday 12/17/2012
                                                                         First Exam is scheduled for Week 4 on Friday 12/21/2012
Assignment #3 Due Thursday 01/10/2013
Assignment #4 Due Thursday 01/24/2013
Assignment #5 Due Friday 02/01/2013
                                                                        Second Exam is scheduled for Week 8 on Thursday 01/31/2013
Assignment #6 BONUS Due Thursday 02/14/2013
                                                                        FINAL Exam is schedule on SIS.

 Laboratory:

Server Access to KGCOE-kif                                           VLSI Remote Access Instructions

Lab JMP IN                                            EMCR320_lab_JMP_IN_questions
Lab SPC and Process Capability
                                                                Data for first 30 days of photoresist CD
                                                                Day 31 through 34
Lab Student "t" and One-way ANOVA
                                                                DATA >>>> Chapter 12 Problem 1
                                                                DATA >>>> Lab3_oxide_data
Lab ANOVA on Full Factorial Design
Lab Regression and Zero Point information in Factorial Designs
Lab ANOVA on Fractional Factorial Design
Lab Response Surface Methodology 320_Project_Resist_Characterization20102a.pdf

TA's 475.4453 Office 09/1360

       
TA   xxx@rit.edu


Lab Report Guidelines

and other

Microlithography Lab references plus example presentation and papers for DOE


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