ROCHESTER INSTITUTE OF TECHNOLOGY

Department of Microelectronic Engineering

0305-221 Introduction to Micro/Nanolithography

0305-221 An introduction to the fundamentals of micro/nanolithography for patterning. Topics include IC masking, sensitometry, radiometry, resolution, contact lithography, projection lithography, photoresist materials and processing. Laboratories include mask making, source characterization, resist characterization, and stepper operation.

Instructor: Dale Ewbank, 475-4941, dale.ewbank@rit.edu

Office: ENG-2551

Pre-Requisite:

1. Introduction to College Chemistry (1011-208)

2. Intro to Microelectronics (0305-201) or transfer

Textbook:

None.

Course Objectives:

This course is a freshmen level undergraduate course designed to introduce students to the topics of microlithography. Specifically, objectives are:

1. To understand the physical and chemical aspects of lithographic imaging.

2. To examine the fundamentals of sensitometry and radiometry.

3. To study resist materials and process considerations for semiconductor lithography.

Course Topics: (Lecture Hours per topic)

1. Introduction to microlithography; history, evolution, perspective (2)

2. Principles of Maskmaking (4)

3. Principles of Sensitometry (5)

5. Radiometry and Photometry (3)

6. Principles of microlithography (6)

7. Microlithographic processing (6)

8. Nanolithography for ICs (2)

Lecture Schedule 3 hours per week

Laboratory Topics: (Lab hours per topic)

1. Saftey, Notebooks, and Photomasks (3)

2. Stepper, Wafertrack, and Resist processing (6)

3. Resist Sensitivity and Contrast (6)

4. Pattern Transfer and Etching (9)

5. Second Masking/Alignment (6)

Equipment used: i-line stepper, g-line stepper, contact printer, wafertracks, thickness measurement, radiometers, hand spinners, dry etch tools, chemical benches.

Laboratory Schedule 3 hours per week

Evaluation Methods:

Exams (2) 25%

Homework 25%

Laboratory 25%

Final Exam 25%

Student Learning Outcomes:

Student will understand the basic physical and chemical aspects of microlithography needed for pattern transfer.
Student will conduct experiments to characterize a microlithographic process. Student will exhibit their ability to write detailed information about their laboratory experiment in a report.

Course Policy on Academic Honesty

KGCOE Honor Principles: RIT Engineering faculty, staff and students are truthful and honorable, and do not tolerate lying, cheating, stealing, or plagiarism.

All members of our community are expected to abide by these principles and to embrace the spirit they represent. We each have a responsibility to address any unethical behavior we observe; either through direct discussion with the offending party, or by discussion with an appropriate faculty or staff member. Allowing unethical behavior to continue unchallenged is not acceptable.

Rochester Institute of Technology does not condone any form of academic dishonesty. Academic Dishonesty falls into three basic areas: cheating, duplicate submission and plagiarism (refer to http://www.rit.edu/kgcoe/advising/handbook.pdf pages 19-20 for more information).

Throughout this course the following specific conditions exist in regards to academic honesty:

Course Element	Specific Conditions
Homework: Graded and Ungraded	Student collaboration is encouraged. However, the final product that is turned in must be your own work. All homework sets must be completely documented in regards to references used (books other than the course textbook, web sites, etc.) and assistance obtained from individuals other than the course instructor. Proper documentation would include source, date, and extent of information gained through that source.
Exams	Individual exercise; collaboration of any kind is disallowed
Laboratory Assignments	All team members expected to participate fully; one submission required from each student

Any act of Academic Dishonesty will incur the following consequences. After notifying and presenting the student with evidence of such misconduct, the instructor has the full prerogative to assign a lower grade, including an “F” for the offense itself or for the entire course. If after careful review of the evidence, the instructor decides that the student’s actions are indeed misconduct and warrant a penalty, the instructor will add a letter to the student’s file in his or her home department (copy to the student, Department Head and the Dean) documenting the offense. Depending on the seriousness of the offense, the student may also be brought before the Academic Conduct Committee of the College in which the offense occurred, and may face academic suspension or dismissal from the Institute. The student has the right to appeal any disciplinary action as described in section D17.0 “Academic Conduct and Appeals Procedures” and D18.0 “RIT Student Conduct Process” of the Institute Policies and Procedures Manual.